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Microfabricated Transition-Edge X-ray Detectors



Gene C. Hilton, John M. Martinis, Kent D. Irwin, Norman F. Bergren, David A. Wollman, Martin Huber, Sae Woo Nam


We are developing high performance x-ray detectors based on superconducting transition-edge sensors (TES) for application in materials analysis and astronomy. Using our recently developed fully lithographic TES fabrication process, we have made devices with an energy resolution of 4.5 1 0.1 eV for 5.9 keV x-rays, the best reported energy resolution for any energy dispersive detectors in this energy range. These detectors utilize micromachined thermal isolation structures, and transition-edge sensors fabricated from Mo/Cu bilayers with normal-metal bountary conditions. We have found the normal-metal boundary conditions to be critical to stable and reproducible low noise operation. In this lpaper we present details of fabrication and performance of these devices.
IEEE Transactions on Applied Superconductivity


Hilton, G. , Martinis, J. , Irwin, K. , Bergren, N. , Wollman, D. , Huber, M. and Nam, S. (2001), Microfabricated Transition-Edge X-ray Detectors, IEEE Transactions on Applied Superconductivity, [online], (Accessed June 16, 2024)


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Created February 28, 2001, Updated October 12, 2021