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Microcalorimeter Energy Dispersive X-ray Spectrometer for Low Voltage Microanalysis



David A. Wollman, John M. Martinis, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, David A. Rudman, Norman F. Bergren, Steven Deiker, Martin Huber, Dale Newbury


Improved x-ray detector technology continues to be a critical metrological need in the semiconductor industry for contaminant particle analysis1,2 and for high-spatial-resolution x-ray microanalysis using low-beam-voltage field-emission scanning electron microscopes (FE-SEMs).3,4 In response to this need, we have developed at NIST a prototype microcalorimeter energy-dispersive spectrometer (5cal EDS) with high energy resolution for x-ray microanalysis.2,3,5 This microcalorimeter technology is currently being commercialized. With commercialization and continued development, 5cal EDS will extend the capabilities of x-ray microanalystical instruments to help meet the analytical requirements for current and future technology generations in the semiconductor industry.
Electron. Dev. Failure Anal. News


failure analysis, microcalorimeters, particle analysis, x-ray detector


Wollman, D. , Martinis, J. , Nam, S. , Hilton, G. , Irwin, K. , Rudman, D. , Bergren, N. , Deiker, S. , Huber, M. and Newbury, D. (2000), Microcalorimeter Energy Dispersive X-ray Spectrometer for Low Voltage Microanalysis, Electron. Dev. Failure Anal. News (Accessed April 16, 2024)
Created October 31, 2000, Updated October 12, 2021