Microcalorimeter Energy-Dispersive Spectrometry Using a Low Voltage Scanning Electron Microscope
David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, Norman F. Bergren, David A. Rudman, John M. Martinis, Dale Newbury
We describe the current performance of the prototype microcalorimeter energy-dispersive spectrometer (5cal EDS) developed at NIST for X-ray microanalysis. We show that the low-energy 5cal EDS, designed for operation in the energy range 0.2-2 keV, offers significant advantages for low-beam-energy microanalysis. We present several examples in which the prototype 5cal EDS has been used to solve problems in low-voltage microanalysis. Including the analysis of tungsten silicide (WSI2), titanium nitride (TiN)and Barium titanate (BaTiO3) and the measurement of chemical shifts in Fe and C compounds.
, Nam, S.
, Hilton, G.
, Irwin, K.
, Bergren, N.
, Rudman, D.
, Martinis, J.
and Newbury, D.
Microcalorimeter Energy-Dispersive Spectrometry Using a Low Voltage Scanning Electron Microscope, J. Microscopy
(Accessed May 29, 2023)