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Microcalorimeter Energy-Dispersive Spectrometry Using a Low Voltage Scanning Electron Microscope

Published

Author(s)

David A. Wollman, Sae Woo Nam, Gene C. Hilton, Kent D. Irwin, Norman F. Bergren, David A. Rudman, John M. Martinis, Dale Newbury

Abstract

We describe the current performance of the prototype microcalorimeter energy-dispersive spectrometer (5cal EDS) developed at NIST for X-ray microanalysis. We show that the low-energy 5cal EDS, designed for operation in the energy range 0.2-2 keV, offers significant advantages for low-beam-energy microanalysis. We present several examples in which the prototype 5cal EDS has been used to solve problems in low-voltage microanalysis. Including the analysis of tungsten silicide (WSI2), titanium nitride (TiN)and Barium titanate (BaTiO3) and the measurement of chemical shifts in Fe and C compounds.
Citation
J. Microscopy
Volume
199
Issue
1

Keywords

EDS, EDS, EDS, EDS, energy dispersive spectrometer, low-beam-energy microanalysis, low-voltage microanalysis, microcalorimeter, 5cal

Citation

Wollman, D. , Nam, S. , Hilton, G. , Irwin, K. , Bergren, N. , Rudman, D. , Martinis, J. and Newbury, D. (2000), Microcalorimeter Energy-Dispersive Spectrometry Using a Low Voltage Scanning Electron Microscope, J. Microscopy (Accessed July 23, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created June 30, 2000, Updated October 12, 2021