Micro X-Ray Fluorescence of Particles Using a Laboratory X-Ray Tube and a Polycapillary Optic
J R. Swider, Terrence J. Jach, Eric B. Steel
To create a microanalysis instrument that has low detection limits and can spatially resolve elemental distributions, we have utilized the benefits of X-ray Fluorescence (XRF) with a capillary focusing optic of the many methods used for x-ray focusing, capillary optics best suit a micro-XRF instrument: the devices are compact, easy to implement, focus a divergent beam, and conserve the beam brilliance. Our capillary micro-XRF instrument has successfully analyzed spherical particles down to 10 υm in diameter. Detection is in the range of 0.1 ng for elements in silicate glasses excited with tungsten tube radiation. The instrument is easily manipulated to accomodate samples in a variety of shapes and sizes and to analyze samples in situ.