Bullis, W.
(1980),
Metrology for submicrometer devices and circuits:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-61
(Accessed October 13, 2024)
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Metrology for submicrometer devices and circuits:
Published
Author(s)
Citation
- NBS SP 400-61
Report Number
NBS SP 400-61
Pub Type
NIST Pubs
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Created January 1, 1980, Updated May 19, 2023