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Metrology for submicrometer devices and circuits:

Published

Author(s)

W Murray Bullis
Citation
- NBS SP 400-61
Report Number
NBS SP 400-61

Citation

Bullis, W. (1980), Metrology for submicrometer devices and circuits:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NBS.SP.400-61 (Accessed February 25, 2024)
Created January 1, 1980, Updated May 19, 2023