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Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry

Published

Author(s)

David G. Seiler, John S. Suehle

Abstract

This special article in Semiconductor International discusses NIST's role in metrology for the semiconductor industry as it moves to the nanoscale regime.
Citation
Semiconductor International

Citation

Seiler, D. and Suehle, J. (2006), Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry, Semiconductor International (Accessed July 22, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 1, 2006, Updated January 27, 2020