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PUBLICATIONS

Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry

Published

Author(s)

David G. Seiler, John S. Suehle

Abstract

This special article in Semiconductor International discusses NIST's role in metrology for the semiconductor industry as it moves to the nanoscale regime.
Citation
Semiconductor International
Pub Type
Journals
Electronics and Materials

Citation

Seiler, D. and Suehle, J. (2006), Metrology in the Nanoelectronics Era: Collaborative Innovation Between NIST and Industry, Semiconductor International (Accessed October 7, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created November 1, 2006, Updated January 27, 2020
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