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MEMS Standards Development at the National Institute of Standards and Technology

Published

Author(s)

Richard A. Allen

Citation

Allen, R. (2010), MEMS Standards Development at the National Institute of Standards and Technology (Accessed October 11, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created July 22, 2010, Updated February 19, 2017