Allen, R.
(2009),
MEMS Standards Development at the National Institute of Standard and Technology
(Accessed October 12, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
MEMS Standards Development at the National Institute of Standard and Technology
Published
Author(s)
Pub Type
Talks
Keywords
MEMS, standards, SRM, wafer bond strength
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created October 12, 2009, Updated February 19, 2017