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MEMS Standards Development at the National Institute of Standard and Technology

Published

Author(s)

Richard A. Allen

Keywords

MEMS, standards, SRM, wafer bond strength

Citation

Allen, R. (2009), MEMS Standards Development at the National Institute of Standard and Technology (Accessed May 26, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created October 12, 2009, Updated February 19, 2017