Allen, R.
(2009),
MEMS Standards Development at the National Institute of Standard and Technology
(Accessed October 4, 2023)
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MEMS Standards Development at the National Institute of Standard and Technology
Published
Author(s)
Pub Type
Talks
Keywords
MEMS, standards, SRM, wafer bond strength
Citation
Created October 12, 2009, Updated February 19, 2017