Allen, R.
(2009),
MEMS Standards Development at the National Institute of Standard and Technology
(Accessed January 16, 2026)
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MEMS Standards Development at the National Institute of Standard and Technology
Published
Author(s)
Pub Type
Talks
Keywords
MEMS, standards, SRM, wafer bond strength
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Created October 12, 2009, Updated February 19, 2017