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Standardization and metrology are critical infrastructure needs for the MEMS industry. These needs incluse standard test structures and test methods, and standard reference materials. In addition to this, new protocols to disseminate standards and test
Proceedings Title
Proc., 6th International Micromachine Symposium
Conference Location
Tokyo, JA
Pub Type
Conferences
Keywords
MEMS, standards, MEMS foundary, test structures, microheating element
Citation
Gaitan, M.
(2000),
MEMS Standardization, Proc., 6th International Micromachine Symposium, Tokyo, JA
(Accessed April 26, 2024)