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MEMS Standardization

Published

Author(s)

Michael Gaitan

Abstract

Standardization and metrology are critical infrastructure needs for the MEMS industry. These needs incluse standard test structures and test methods, and standard reference materials. In addition to this, new protocols to disseminate standards and test
Proceedings Title
Proc., 6th International Micromachine Symposium
Conference Location
Tokyo, JA

Keywords

MEMS, standards, MEMS foundary, test structures, microheating element

Citation

Gaitan, M. (2000), MEMS Standardization, Proc., 6th International Micromachine Symposium, Tokyo, JA (Accessed April 19, 2024)
Created December 31, 2000, Updated February 17, 2017