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MEMS Standardization



Michael Gaitan


Standardization and metrology are critical infrastructure needs for the MEMS industry. These needs incluse standard test structures and test methods, and standard reference materials. In addition to this, new protocols to disseminate standards and test
Proceedings Title
Proc., 6th International Micromachine Symposium
Conference Location
Tokyo, JA


MEMS, standards, MEMS foundary, test structures, microheating element


Gaitan, M. (2000), MEMS Standardization, Proc., 6th International Micromachine Symposium, Tokyo, JA (Accessed April 19, 2024)
Created December 31, 2000, Updated February 17, 2017