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MEMS Sensors for HVAC&R: Small, Fast, Cheap.

Published

Author(s)

David A. Yashar, Piotr A. Domanski

Abstract

Microelectronic mechanical systems (MEMS) have revolutionized the market for sensors by providing small, fast-responding measurement devices at lowcost. They have been widely accepted in several commonproducts. As an example, today’s automobile uses between 25 and 70 MEMS sensors to gather information where traditional macroscale sensors would be far too expensive to use.1 Increasing pressure for improved operating efficiency and reliability of HVAC&R equipment will promote the use of MEMS sensors in comprehensive fault detection and diagnostics (FDD) schemes. The combination of MEMS sensors, FDD, and networking capabilities has the potential to change the way refrigeration and air-conditioning systems are monitored and serviced.
Citation
Ashrae Journal

Keywords

sensors, costs, viscosity, flow velocity, pressure drop

Citation

Yashar, D. and Domanski, P. (2004), MEMS Sensors for HVAC&R: Small, Fast, Cheap., Ashrae Journal, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=101107 (Accessed March 3, 2024)
Created December 1, 2004, Updated February 19, 2017