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MEMS Device for Fatigue Testing of 25 µm Thick Aluminum Specimens

Published

Author(s)

Li-Anne Liew, David T. Read, Nicholas Barbosa

Abstract

We report the development and demonstration of a MEMS test instrument to perform fatigue testing on 25 µm thick aluminum 1145 H19 foil. Both the foil material and the specimen fabrication were obtained from commercial sources, separate from the fabrication of the MEMS device, which was done in-house. The loading was in bending with a ratio R of minimum to maximum load equal to zero. The gauge section of the specimens had a minimum width of about 120 µm. The bending load was applied at a distance of about 3 mm from the gage section, through a lever arm fabricated as part of the specimen. The forces used were on the order of 5 mN, while the displacements at the load point were up to 50 µm. The loading waveform was a 70 hertz square wave. The S-N curve exhibits the expected behavior, with the shortest lives occurring at stresses near the tensile strength, and the longest at stresses near half that value. The cracks exhibited a very abrupt transition between the incubation stage, marked by increasing surface deformations and other evidence of local microstructural damage, and the rapid growth stage. The failure criterion used for the S-N curve was the beginning of the rapid-growth stage.
Proceedings Title
Experimental and Applied Mechanics, Volume 4. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, New York, NY
Volume
53
Issue
5
Conference Dates
June 11-14, 2012
Conference Location
Costa Mesa, CA, US
Conference Title
SEM XII Congress & Exposition on Experimental and Applied Mechanics

Keywords

Aluminum, fatigue, MEMS, miniaturization, testing.

Citation

Liew, L. , Read, D. and Barbosa, N. (2013), MEMS Device for Fatigue Testing of 25 µm Thick Aluminum Specimens, Experimental and Applied Mechanics, Volume 4. Conference Proceedings of the Society for Experimental Mechanics Series. Springer, New York, NY, Costa Mesa, CA, US, [online], https://doi.org/10.1007/978-1-46 (Accessed July 15, 2024)

Issues

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Created June 12, 2013, Updated October 12, 2021