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MEMS-based universal fatigue test technique



Li-Anne Liew, David T. Read, Nicholas Barbosa


We have developed a MEMS (micro electro mechanical systems) -based method for fatigue testing of micro- to millimeter-sized specimens of any material (hence ‘universal’). The miniature, re- usable, stand-alone fatigue test frame is fabricated as a single MEMS chip. Specimens of any material can be manually mounted in the chip and fatigue-tested. We describe the design and construction of the MEMS device, specimens, the test protocol, and show S-N results for 25 micrometer thick Al 1145 H19 foil. The S-N results are in accord with expectation and examination of the fracture surface by scanning electron microscopy shows distinct regions corresponding to slow and fast crack growth.
Experimental Mechanics


Aluminum, fatigue, MEMS, test technique.


Liew, L. , Read, D. and Barbosa, N. (2012), MEMS-based universal fatigue test technique, Experimental Mechanics, [online], (Accessed June 24, 2024)


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Created August 22, 2012, Updated November 10, 2018