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Measurements on the NIST GEC Reference Cell, SPIE, Vol. 1392

Published

Author(s)

J R. Roberts, James K. Olthoff, R J. Van brunt, James R. Whetstone
Proceedings Title
Advanced Techniques for Integrated Circuit
Conference Dates
October 1-5, 1990
Conference Location
Santa Clara, CA
Conference Title
Advanced Techniques for Integrated Circuit Processing

Citation

Roberts, J. , Olthoff, J. , Van, R. and Whetstone, J. (1991), Measurements on the NIST GEC Reference Cell, SPIE, Vol. 1392, Advanced Techniques for Integrated Circuit , Santa Clara, CA (Accessed June 13, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 1991, Updated February 17, 2017