Roberts, J.
, Olthoff, J.
, Van, R.
and Whetstone, J.
(1991),
Measurements on the NIST GEC Reference Cell, SPIE, Vol. 1392, Advanced Techniques for Integrated Circuit , Santa Clara, CA
(Accessed April 23, 2024)
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Measurements on the NIST GEC Reference Cell, SPIE, Vol. 1392
Published
Author(s)
, , R J. Van brunt,
Proceedings Title
Advanced Techniques for Integrated Circuit
Conference Dates
October 1-5, 1990
Conference Location
Santa Clara, CA
Conference Title
Advanced Techniques for Integrated Circuit Processing
Pub Type
Conferences
Citation
Created January 1, 1991, Updated February 17, 2017