Roberts, J.
, Olthoff, J.
, Van Brunt, R.
and Whetstone, J.
(1991),
Measurements on the NIST GEC Reference Cell, Advanced Techniques for Integrated Circuit Processing
(Accessed June 8, 2023)
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Measurements on the NIST GEC Reference Cell
Published
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Citation
Advanced Techniques for Integrated Circuit Processing
Pub Type
Journals
Citation
Created December 31, 1990, Updated October 12, 2021