Roberts, J.
, Olthoff, J.
, Van Brunt, R.
and Whetstone, J.
(1991),
Measurements on the NIST GEC Reference Cell, Advanced Techniques for Integrated Circuit Processing
(Accessed May 2, 2025)
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Measurements on the NIST GEC Reference Cell
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Advanced Techniques for Integrated Circuit Processing
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If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 31, 1990, Updated October 12, 2021