Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Measurements on the NIST GEC Reference Cell

Published

Author(s)

J R. Roberts, James K. Olthoff, Richard J. Van Brunt, James Whetstone
Citation
Advanced Techniques for Integrated Circuit Processing

Citation

Roberts, J. , Olthoff, J. , Van Brunt, R. and Whetstone, J. (1991), Measurements on the NIST GEC Reference Cell, Advanced Techniques for Integrated Circuit Processing (Accessed April 20, 2024)
Created December 31, 1990, Updated October 12, 2021