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Measurement of Interface Defects in Gated SIMOX Structures

Published

Author(s)

Santos D. Mayo, J R. Lowney, Peter Roitman
Proceedings Title
Proc., 1991 IEEE International SOI Conference
Conference Dates
October 1-3, 1991
Conference Location
Vail Valley, CO, USA

Citation

Mayo, S. , Lowney, J. and Roitman, P. (1991), Measurement of Interface Defects in Gated SIMOX Structures, Proc., 1991 IEEE International SOI Conference, Vail Valley, CO, USA (Accessed December 11, 2024)

Issues

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Created December 30, 1991, Updated October 12, 2021