Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy
Donna C. Hurley, Malgorzata Kopycinska-Mueller, Tony B. Kos
We are developing tools that use the atomic force microscope (AFM) to measure mechanical properties with nanoscale spatial resolution. Contact-resonance-spectroscopy techniques such as atomic force acoustic microscopy (AFAM) involve the vibrational modes of the AFM cantilever when its tip is in contact with a material. These methods enable quantitative maps of local mechanical properties such as elastic modulus and thin-film adhesion. The information obtained furthers our understanding of patterned surfaces, thin films, and nanoscale structures.
, Kopycinska-Mueller, M.
and Kos, T.
Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy, Jom, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50435
(Accessed November 30, 2023)