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Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy

Published

Author(s)

Donna C. Hurley, Malgorzata Kopycinska-Mueller, Tony B. Kos

Abstract

We are developing tools that use the atomic force microscope (AFM) to measure mechanical properties with nanoscale spatial resolution. Contact-resonance-spectroscopy techniques such as atomic force acoustic microscopy (AFAM) involve the vibrational modes of the AFM cantilever when its tip is in contact with a material. These methods enable quantitative maps of local mechanical properties such as elastic modulus and thin-film adhesion. The information obtained furthers our understanding of patterned surfaces, thin films, and nanoscale structures.
Citation
Jom
Volume
59
Issue
1

Keywords

atomic force microscopy, mechanical properties, atomic force acoustic microscopy, nanomechanics

Citation

Hurley, D. , Kopycinska-Mueller, M. and Kos, T. (2007), Mapping Mechanical Properties on the Nanoscale with Atomic Force Acoustic Microscopy, Jom, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=50435 (Accessed June 21, 2024)

Issues

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Created January 30, 2007, Updated October 12, 2021