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Lumped-Element Impedance Standards

Published

Author(s)

Dylan F. Williams, Dave K. Walker

Abstract

We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard's impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Volume
33
Conference Dates
June 7-12, 1998
Conference Location
Baltimore, MD

Keywords

electrical impedance standard, on-wafer calibration, wafer probes

Citation

Williams, D. and Walker, D. (1998), Lumped-Element Impedance Standards, Tech Dig., Auto. RF Tech. Group Conf., Baltimore, MD, [online], https://doi.org/10.1109/ARFTG.1998.327285 (Accessed June 1, 2023)
Created June 1, 1998, Updated November 10, 2018