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Lumped-Element Impedance Standards



Dylan F. Williams, Dave K. Walker


We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard's impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Conference Dates
June 7-12, 1998
Conference Location
Baltimore, MD


electrical impedance standard, on-wafer calibration, wafer probes


Williams, D. and Walker, D. (1998), Lumped-Element Impedance Standards, Tech Dig., Auto. RF Tech. Group Conf., Baltimore, MD, [online], (Accessed July 18, 2024)


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Created June 1, 1998, Updated November 10, 2018