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We measure the electrical parameters of commercial lumped-element impedance standards manufactured for the calibration of on-wafer probing systems. The standard's impedance depends not only on the standard itself, but also on probe placement, probe construction, and the reference calibration.
Williams, D.
and Walker, D.
(1998),
Lumped-Element Impedance Standards, Tech Dig., Auto. RF Tech. Group Conf., Baltimore, MD, [online], https://doi.org/10.1109/ARFTG.1998.327285
(Accessed November 30, 2023)