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Low-Leakage Superconducting Tunnel Junctions with a Single-Crystal Al2O3 Barrier
Published
Author(s)
Seongshik Oh, Katarina Cicak, Kevin Osborn, Raymond Simmonds, David P. Pappas, Robert Mcdermott, Ken B. Cooper, Matthias Steffen, John M. Martinis
Abstract
We have developed a two-step growth scheme for single-crystal Al2O3 tunnel barriers. The barriers are epitaxially grown on single-crystal rhenium (Re) base electrodes that are grown epitaxially on a sapphire substrate, while polycrystalline Al is used as the top electrode. We show that, by first growing an amorphous Al oxide layer at room temperature and crystallizing it at a high temperature in oxygen environment, a morphologically intact single-crystal Al2O3 layer is obtained. Tunnel junctions fabricated from these trilayers show very low subgap leakage current with a quality factor of 1200. This leakage-free single-crystal Al2O3 junction has opened a new venue for coherent quantum devices.
Oh, S.
, Cicak, K.
, Osborn, K.
, Simmonds, R.
, Pappas, D.
, Mcdermott, R.
, Cooper, K.
, Steffen, M.
and Martinis, J.
(2005),
Low-Leakage Superconducting Tunnel Junctions with a Single-Crystal Al2O3 Barrier, Superconductor Science and Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32036
(Accessed October 24, 2025)