Holm, J.
(2022),
Low-keV Transmission Electron Imaging and Diffraction of Ultrathin Highly Beam-Sensitive MFI Zeolites in a Scanning Electron Microscope, Microscopy and Microanalysis, [online], https://doi.org/10.1093/micmic/ozac010, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934693
(Accessed October 22, 2025)
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Low-keV Transmission Electron Imaging and Diffraction of Ultrathin Highly Beam-Sensitive MFI Zeolites in a Scanning Electron Microscope
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Abstract
This manuscript demonstrates the susceptibility of ultrathin Mobil Five (MFI) zeolite nanosheets to low-keV electron beam damage in a scanning electron microscope (SEM). Beam dose rates and characteristic beam doses are quantified at beam energies from 15 keV to 30 keV using an on-axis transmission electron detector to measure signal decay times in diffraction patterns and by underfocusing to enable spot size measurement. Characteristic beam doses ranged from approximately 1.9 C/cm2 at 15 keV to 14 C/cm2 at 30 keV, and the damage mechanism was attributable to radiolysis but other processes including electrostatic charging and sputtering could not be ruled out.Citation
Microscopy and Microanalysis
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Journals
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Keywords
beam damage, dose, SEM, 4D STEM, STEM-in-SEM, zeolite, 2D materials
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Created December 20, 2022, Updated January 24, 2023