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Low Accelerating Voltage SEM Imaging and Metrology Using Backscattered Electrons

Published

Author(s)

Michael T. Postek
Citation
Review of Scientific Instruments
Volume
61
Issue
12

Citation

Postek, M. (1990), Low Accelerating Voltage SEM Imaging and Metrology Using Backscattered Electrons, Review of Scientific Instruments (Accessed May 24, 2024)

Issues

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Created December 1, 1990, Updated February 17, 2017