Rozsa, K.
, Bano, G.
and Gallagher, A.
(2001),
The location of very small particles in silane rf discharge, IEEE Transactions on Plasma Science
(Accessed December 2, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
The location of very small particles in silane rf discharge
Published
Author(s)
K Rozsa, G Bano, A Gallagher
Citation
IEEE Transactions on Plasma Science
Volume
29
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2001, Updated February 17, 2017