Rozsa, K.
, Bano, G.
and Gallagher, A.
(2001),
The location of very small particles in silane rf discharge, IEEE Transactions on Plasma Science
(Accessed May 10, 2025)
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The location of very small particles in silane rf discharge
Published
Author(s)
K Rozsa, G Bano, A Gallagher
Citation
IEEE Transactions on Plasma Science
Volume
29
Pub Type
Journals
Citation
Issues
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Created January 1, 2001, Updated February 17, 2017