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The location of very small particles in silane rf discharge

Published

Author(s)

K Rozsa, G Bano, A Gallagher
Citation
IEEE Transactions on Plasma Science
Volume
29

Citation

Rozsa, K. , Bano, G. and Gallagher, A. (2001), The location of very small particles in silane rf discharge, IEEE Transactions on Plasma Science (Accessed July 23, 2024)

Issues

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Created January 1, 2001, Updated February 17, 2017