Rozsa, K.
, Bano, G.
and Gallagher, A.
(2001),
The location of very small particles in silane rf discharge, IEEE Transactions on Plasma Science
(Accessed July 26, 2024)
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The location of very small particles in silane rf discharge
Published
Author(s)
K Rozsa, G Bano, A Gallagher
Citation
IEEE Transactions on Plasma Science
Volume
29
Pub Type
Journals
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2001, Updated February 17, 2017