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Local Electrode Atom Probes: Prospects for 3D Atomic-Scale Metrology Applications in the Semiconductor and Data Storage Industries

Published

Author(s)

T F. Kelly, T T. Gribb, R L. Martens, D J. Larson, N Tabat, R J. Matyi, Thomas J. Shaffner
Proceedings Title
Characterization and Metrology for ULSI Technology
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA

Citation

Kelly, T. , Gribb, T. , Martens, R. , Larson, D. , Tabat, N. , Matyi, R. and Shaffner, T. (2001), Local Electrode Atom Probes: Prospects for 3D Atomic-Scale Metrology Applications in the Semiconductor and Data Storage Industries, Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA (Accessed February 27, 2024)
Created January 31, 2001, Updated October 12, 2021