Kelly, T.
, Gribb, T.
, Martens, R.
, Larson, D.
, Tabat, N.
, Matyi, R.
and Shaffner, T.
(2001),
Local Electrode Atom Probes: Prospects for 3D Atomic-Scale Metrology Applications in the Semiconductor and Data Storage Industries, Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
(Accessed December 13, 2024)
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Local Electrode Atom Probes: Prospects for 3D Atomic-Scale Metrology Applications in the Semiconductor and Data Storage Industries
Published
Author(s)
T F. Kelly, T T. Gribb, R L. Martens, D J. Larson, N Tabat, ,
Proceedings Title
Characterization and Metrology for ULSI Technology
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, MD, USA
Pub Type
Conferences
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 31, 2001, Updated October 12, 2021