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Lithography with Self-Assembled Block Copolymer Microdomains

Published

Author(s)

C Harrison, John A. Dagata, P Adamson
Citation
Lithography with Self-Assembled Block Copolymer Microdomains
Publisher Info
Developments in Block Copolymer Science and Technology, ed.,

Keywords

Copolymers, Lithography, Thin Films, copolymer, self-assembly

Citation

Harrison, C. , Dagata, J. and Adamson, P. (2004), Lithography with Self-Assembled Block Copolymer Microdomains, Developments in Block Copolymer Science and Technology, ed., , [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853929 (Accessed April 24, 2024)
Created January 1, 2004, Updated February 19, 2017