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A Lithographic SEM Magnification Standard

Published

Author(s)

Michael T. Postek, R. C. Tiberio
Citation
Research Accomplishments, 1987-1988, National Nanofabrication Facility at Cornell

Citation

Postek, M. and Tiberio, R. (1988), A Lithographic SEM Magnification Standard, Research Accomplishments, 1987-1988, National Nanofabrication Facility at Cornell (Accessed May 27, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created November 30, 1988, Updated February 19, 2017