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In-Line Multiport Calibration Algorithm



Dylan F. Williams, Dave K. Walker


We present a multiport measurement procedure well suited to on-wafer measurement. It can correct multiport measurements with any conventional in-line calibration, including the thru-reflect-line calibration. We demonstrate the procedure in a four-port measurement system.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Conference Dates
June 7-12, 1998
Conference Location
Baltimore, MD


electrical impedance standard, on-wafer calibration, wafer probes


Williams, D. and Walker, D. (1998), In-Line Multiport Calibration Algorithm, Tech Dig., Auto. RF Tech. Group Conf., Baltimore, MD, [online], (Accessed April 21, 2024)
Created June 1, 1998, Updated November 10, 2018