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In-Line Multiport Calibration Algorithm

Published

Author(s)

Dylan F. Williams, Dave K. Walker

Abstract

We present a multiport measurement procedure well suited to on-wafer measurement. It can correct multiport measurements with any conventional in-line calibration, including the thru-reflect-line calibration. We demonstrate the procedure in a four-port measurement system.
Proceedings Title
Tech Dig., Auto. RF Tech. Group Conf.
Conference Dates
June 7-12, 1998
Conference Location
Baltimore, MD

Keywords

electrical impedance standard, on-wafer calibration, wafer probes

Citation

Williams, D. and Walker, D. (1998), In-Line Multiport Calibration Algorithm, Tech Dig., Auto. RF Tech. Group Conf., Baltimore, MD, [online], https://doi.org/10.1109/ARFTG.1998.327284 (Accessed September 22, 2021)
Created June 1, 1998, Updated November 10, 2018