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We present a multiport measurement procedure well suited to on-wafer measurement. It can correct multiport measurements with any conventional in-line calibration, including the thru-reflect-line calibration. We demonstrate the procedure in a four-port measurement system.
Williams, D.
and Walker, D.
(1998),
In-Line Multiport Calibration Algorithm, Tech Dig., Auto. RF Tech. Group Conf., Baltimore, MD, [online], https://doi.org/10.1109/ARFTG.1998.327284
(Accessed May 31, 2023)