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Laser-lithographically written micron-wide superconducting nanowire single-photon detectors

Published

Author(s)

Maximilian Protte, Varun Verma, Jan Philipp Hopker, Richard Mirin, Sae Woo Nam, Tim Bartley

Abstract

In this paper, we demonstrate our results on micron-wide tungsten silicide superconducting nanowire single-photon detectors fabricated by laser lithography. Laser-lithographically written devices allow for fast and easy structuring of large areas while maintaining a saturated internal efficiency for wire width around 1 um
Citation
Superconductor Science & Technology

Keywords

SNSPD, detector, single-photon, lithography

Citation

Protte, M. , Verma, V. , Hopker, J. , Mirin, R. , Nam, S. and Bartley, T. (2022), Laser-lithographically written micron-wide superconducting nanowire single-photon detectors, Superconductor Science & Technology, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=933523 (Accessed April 20, 2024)
Created March 23, 2022, Updated May 5, 2023