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Langmuir Probe Measurements in an Inductively Coupled Plasma Source
Published
Author(s)
A Schwabedissen, Eric C. Benck, J R. Roberts
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
55
Pub Type
Journals
Citation
Schwabedissen, A.
, Benck, E.
and Roberts, J.
(1997),
Langmuir Probe Measurements in an Inductively Coupled Plasma Source, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
(Accessed May 3, 2024)