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Langmuir Probe Measurements in an Inductively Coupled Plasma Source

Published

Author(s)

A Schwabedissen, Eric C. Benck, J R. Roberts
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
55

Citation

Schwabedissen, A. , Benck, E. and Roberts, J. (1997), Langmuir Probe Measurements in an Inductively Coupled Plasma Source, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) (Accessed February 20, 2024)
Created January 1, 1997, Updated February 17, 2017