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Kinetic-Energy Distributions of Ions Sampled from Argon Plasmas in a Parallel-Plate Radio Frequency Reference Cell

Published

Author(s)

James K. Olthoff, Richard J. Van Brunt, S. B. Radovanov, J. A. Rees, R. Surowiec
Citation
Journal of Applied Physics
Volume
75

Citation

Olthoff, J. , Van Brunt, R. , Radovanov, S. , Rees, J. and Surowiec, R. (1994), Kinetic-Energy Distributions of Ions Sampled from Argon Plasmas in a Parallel-Plate Radio Frequency Reference Cell, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=27094 (Accessed April 14, 2024)
Created December 31, 1993, Updated October 12, 2021