Meyer, C.
, Allen, D.
, DeWitt, D.
, Kreider, K.
, Lovas, F.
and Tsai, B.
(1999),
ITS-90 Calibration of Radiometers Using Wire/Thin-film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results, 7th International Conference on Advanced Thermal Processing of Semiconductors, Colorado Springs, CO, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=100629
(Accessed October 14, 2024)
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ITS-90 Calibration of Radiometers Using Wire/Thin-film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results
Published
Author(s)
, D W. Allen, D P. Dewitt, , F J. Lovas, B Tsai
Proceedings Title
7th International Conference on Advanced Thermal Processing of Semiconductors
Conference Location
Colorado Springs, CO
Conference Title
Proceedings of RTP '99, The 7th International Conference on Advanced Thermal Processing of Semiconductors
Pub Type
Conferences
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Citation
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If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created December 1, 1999, Updated February 17, 2017