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ITS-90 Calibration of Radiometers Using Wire/Thin-film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results

Published

Author(s)

Christopher W. Meyer, D W. Allen, D P. Dewitt, Kenneth G. Kreider, F J. Lovas, B Tsai
Proceedings Title
7th International Conference on Advanced Thermal Processing of Semiconductors
Conference Location
Colorado Springs, CO
Conference Title
Proceedings of RTP '99, The 7th International Conference on Advanced Thermal Processing of Semiconductors

Citation

Meyer, C. , Allen, D. , DeWitt, D. , Kreider, K. , Lovas, F. and Tsai, B. (1999), ITS-90 Calibration of Radiometers Using Wire/Thin-film Thermocouples in the NIST RTP Tool: Experimental Procedures and Results, 7th International Conference on Advanced Thermal Processing of Semiconductors, Colorado Springs, CO, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=100629 (Accessed April 16, 2024)
Created December 1, 1999, Updated February 17, 2017