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ITRS Chapter: Process Integration, Devices, and Structures

Published

Author(s)

Kwok Ng, Kin P. Cheung
Citation
Future Fab International
Issue
40

Citation

Ng, K. and Cheung, K. (2012), ITRS Chapter: Process Integration, Devices, and Structures, Future Fab International (Accessed July 22, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 11, 2012, Updated October 12, 2021