U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Iridium Barriers for Direct Copper Electrodeposition in Damascene Processing.

Published

Author(s)

Daniel Josell, John E. Bonevich, Thomas P. Moffat
Citation
Electrochemical and Solid State Letters
Pub Type
Journals

Download Paper

Local Download
Materials characterization

Citation

Josell, D. , Bonevich, J. and Moffat, T. (2006), Iridium Barriers for Direct Copper Electrodeposition in Damascene Processing., Electrochemical and Solid State Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901778 (Accessed April 18, 2024)

Created October 1, 2006, Updated February 19, 2017