Absolute cross sections have been measured for reactants typically found in carbon tetrafluoride (CF4) discharges for collision energies below a few hundred electron volts. The reactions investigated include collision-induced dissociation and dissociative electron transfer reactions for CF3+ and F+ colliding with CF4, and collisional electron detachment for F- colliding with CF4. Also presented are measurements of energies and relative intensities of ions generated in dc Townsend CF4 discharges with E/N values ranging from 4 x 10-18 V m2 (4 to 25 kTd). Ion energy and ion intensity data for the Townsend discharges are analyzed in light of the measured cross sections.
Citation: Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Pub Type: Journals
CF<sub>4</sub>, collision induced dissociation, cross sections, dissociative charge transfer, ion energies, ion molecule reactions, Townsend discharge