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Ion Kinetic-Energy Distributions and Balmer-alpha (H?) Excitation in Ar-H2-Radio-Frequency Discharges

Published

Author(s)

S. B. Radovanov, James K. Olthoff, Richard J. Van Brunt, S. Djurovic
Citation
Journal of Applied Physics
Issue
2

Citation

Radovanov, S. , Olthoff, J. , Van Brunt, R. and Djurovic, S. (1995), Ion Kinetic-Energy Distributions and Balmer-alpha (H?) Excitation in Ar-H2-Radio-Frequency Discharges, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=7046 (Accessed March 1, 2024)
Created June 30, 1995, Updated October 12, 2021