Radovanov, S.
, Olthoff, J.
, Van Brunt, R.
and Djurovic, S.
(1995),
Ion Kinetic-Energy Distributions and Balmer-alpha (H?) Excitation in Ar-H2-Radio-Frequency Discharges, Journal of Applied Physics, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=7046
(Accessed December 2, 2024)
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Ion Kinetic-Energy Distributions and Balmer-alpha (H?) Excitation in Ar-H2-Radio-Frequency Discharges
Published
Author(s)
S. B. Radovanov, , , S. Djurovic
Citation
Journal of Applied Physics
Issue
2
Pub Type
Journals
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Created June 30, 1995, Updated October 12, 2021