Benck, E.
, Goyette, A.
and Wang, J.
(2003),
Ion energy distribution and optical measurements in high-density, inductively coupled C4F6 discharges, Journal of Applied Physics
(Accessed June 6, 2023)
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Ion energy distribution and optical measurements in high-density, inductively coupled C4F6 discharges
Published
Author(s)
, A Goyette, J C. Wang
Citation
Journal of Applied Physics
Pub Type
Journals
Citation
Created January 1, 2003, Updated February 17, 2017