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Ion energy distribution and optical measurements in high-density, inductively coupled C4F6 discharges

Published

Author(s)

Eric C. Benck, A Goyette, J C. Wang
Citation
Journal of Applied Physics

Citation

Benck, E. , Goyette, A. and Wang, J. (2003), Ion energy distribution and optical measurements in high-density, inductively coupled C4F6 discharges, Journal of Applied Physics (Accessed April 24, 2024)
Created January 1, 2003, Updated February 17, 2017