Benck, E.
, Goyette, A.
and Wang, J.
(2003),
Ion energy distribution and optical measurements in high-density, inductively coupled C4F6 discharges, Journal of Applied Physics
(Accessed April 25, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Ion energy distribution and optical measurements in high-density, inductively coupled C4F6 discharges
Published
Author(s)
, A Goyette, J C. Wang
Citation
Journal of Applied Physics
Pub Type
Journals
Citation
Created January 1, 2003, Updated February 17, 2017