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Investigation of manufacturing techniques to develop controlled flaws for X-ray computed tomography reliability assessment

Published

Author(s)

Felix Kim, Sarah Robinson, Nikolai Klimov, John Henry J. Scott

Abstract

Various micro and nano-manufacturing techniques were investigated to create controlled flaws for X-ray computed tomography (XCT) phantoms. We explored the use of focused ion beam (FIB), laser micromachining, and projection photolithography with deep reactive ion etching (DRIE) to generate controlled pores from 100s of micrometers to a few micrometers in size. Principles of each technique, fabrication results, and calibration process for the created pores are discussed. We also discuss possible assembly techniques and some initial results. Example scanning electron microscope (SEM) and XCT measurements of the phantoms are shown.
Proceedings Title
Proc. SPIE 12491, 8th International Workshop on Reliability of NDT/NDE
Volume
12491
Conference Dates
March 12-16, 2023
Conference Location
Long Beach, CA, US
Conference Title
SPIE smart structures + Nondestructive Evaluation

Keywords

X-ray computed tomography, reliability, probability of detection, visibility, phantom, segmentation

Citation

Kim, F. , Robinson, S. , Klimov, N. and Scott, J. (2023), Investigation of manufacturing techniques to develop controlled flaws for X-ray computed tomography reliability assessment, Proc. SPIE 12491, 8th International Workshop on Reliability of NDT/NDE, Long Beach, CA, US, [online], https://doi.org/10.1117/12.2660458, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=936276 (Accessed May 27, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 25, 2023, Updated July 21, 2023