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Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography

Published

Author(s)

John H. Burnett, Zachary H. Levine, E L. And shirley
Citation
Future Fab International
Issue
12
Publisher Info
Technology Publishing Ltd , London,

Citation

Burnett, J. , Levine, Z. and And, E. (2002), Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography, Technology Publishing Ltd , London, (Accessed April 14, 2024)
Created January 1, 2002, Updated February 17, 2017