Burnett, J.
, Levine, Z.
and And, E.
(2002),
Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography, Technology Publishing Ltd , London,
(Accessed December 13, 2024)
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Intrinsic Birefringence in Crystalline Optical Materials: A New Concern for Lithography
Published
Author(s)
John H. Burnett, , E L. And shirley
Citation
Future Fab International
Issue
12
Publisher Info
Technology Publishing Ltd , London,
Pub Type
Books
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created January 1, 2002, Updated February 17, 2017