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International Intercomparison for Trace Elements in Silicon Semiconductor Wafers by Neutron Activation Analysis

Published

Author(s)

D. A. Becker, Richard M. Lindstrom, T Z. Hossain
Citation
Semiconductor Characterization Present Status and Future Needs
Publisher Info
AIP Press, Woodbury, NY

Citation

Becker, D. , Lindstrom, R. and Hossain, T. (1995), International Intercomparison for Trace Elements in Silicon Semiconductor Wafers by Neutron Activation Analysis, AIP Press, Woodbury, NY (Accessed April 23, 2024)
Created November 30, 1995, Updated October 12, 2021