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Interfacial Properties of ZrO2 on Silicon

Published

Author(s)

Y S. Lin, R Puthenkovilakam, J Chang, Charles E. Bouldin, Igor Levin, Nhan Van Nguyen, James R. Ehrstein, Ying Sun, P Pianetta, T Conard, Wilfried Vandervorst, V Venturo, S Selbrede
Citation
Journal of Applied Physics
Volume
93
Issue
10

Citation

Lin, Y. , Puthenkovilakam, R. , Chang, J. , Bouldin, C. , Levin, I. , Nguyen, N. , Ehrstein, J. , Sun, Y. , Pianetta, P. , Conard, T. , Vandervorst, W. , Venturo, V. and Selbrede, S. (2003), Interfacial Properties of ZrO<sub>2</sub> on Silicon, Journal of Applied Physics (Accessed March 4, 2024)
Created May 14, 2003, Updated October 12, 2021