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Interface-Anisotropy Induced Asymmetry of Intermixing in Bilayers
Published
Author(s)
P Sule, M. Menyhard, L Kotis, J Labar, William F. Egelhoff Jr.
Abstract
The ion-sputtering induced intermixing is studied by molecular dynamics (MD) simulations and by Auger electron spectroscopy depth profiling (AES-SP) analysis in PT/Ti/Si (Pt/Ti) and Ta/Ti/Pt/Si(Ti/Pt) bilayers. Experimental evidence is found for the asymmetry of intermixing in Pt/Ti and in Ti/Pt. An unexpected enhancement of the injection of the heavy Pt atoms into the Ti substrate is observed both by AES-DP and by MD simulations. In Ti/Pt we get a much weaker interdiffusion than in Pt/Ti. The asymmetry is explained by the back scattering of hyperthermal particles at the anisotropic interface and which is reproduced by computer atomistic simulations. the AES-DP measurments support our earlier predictions obtained for mass anisotropic bilayers.
Citation
Applied Physics Letters
Pub Type
Journals
Keywords
Auger intermixing, bilayers Pt, Si, Ti
Citation
Sule, P.
, Menyhard, M.
, Kotis, L.
, Labar, J.
and Egelhoff Jr., W.
(2021),
Interface-Anisotropy Induced Asymmetry of Intermixing in Bilayers, Applied Physics Letters
(Accessed June 7, 2023)