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Interface-Anisotropy Induced Asymmetry of Intermixing in Bilayers



P Sule, M. Menyhard, L Kotis, J Labar, William F. Egelhoff Jr.


The ion-sputtering induced intermixing is studied by molecular dynamics (MD) simulations and by Auger electron spectroscopy depth profiling (AES-SP) analysis in PT/Ti/Si (Pt/Ti) and Ta/Ti/Pt/Si(Ti/Pt) bilayers. Experimental evidence is found for the asymmetry of intermixing in Pt/Ti and in Ti/Pt. An unexpected enhancement of the injection of the heavy Pt atoms into the Ti substrate is observed both by AES-DP and by MD simulations. In Ti/Pt we get a much weaker interdiffusion than in Pt/Ti. The asymmetry is explained by the back scattering of hyperthermal particles at the anisotropic interface and which is reproduced by computer atomistic simulations. the AES-DP measurments support our earlier predictions obtained for mass anisotropic bilayers.
Applied Physics Letters


Auger intermixing, bilayers Pt, Si, Ti


Sule, P. , Menyhard, M. , Kotis, L. , Labar, J. and Egelhoff Jr., W. (2021), Interface-Anisotropy Induced Asymmetry of Intermixing in Bilayers, Applied Physics Letters (Accessed April 13, 2024)
Created October 12, 2021