The Integration of Molecular Electronic Devices with Traditional CMOS Technologies
Nadine E. Gergel-Hackett, Askia A. Hill, Christina A. Hacker, Curt A. Richter
This work describes the development of hybrid circuits composed of silicon-based molecular electronic devices and traditional CMOS technology. In the development of these circuits, we first fabricated individual CMOS-compatible molecular electronic devices and established their effectiveness. We then designed and used traditional VLSI tools to layout a hybrid circuit that includes CMOS for the on-chip characterization of the molecular devices, as well as a platform composed of the contacts and interconnects for the molecular electronic devices. Finally, we developed the procedures for the post-processing fabrication of the molecular electronic devices using CMOS-compatible techniques. This work is an important step towards the realization of hybrid molecular/traditional circuits, both for advancing novel 'beyond CMOS' molecular electronic technology, but also for enabling hybrid circuits for the on-chip characterization of the molecular electronic devices via CMOS instrumentation.
Proceedings of the 8th International Conference on Nanotechnology
, Hill, A.
, Hacker, C.
and Richter, C.
The Integration of Molecular Electronic Devices with Traditional CMOS Technologies, Proceedings of the 8th International Conference on Nanotechnology, Arlington, TX, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=33021
(Accessed March 1, 2024)