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The Influence of Different Coil Geometries on the Spatial Distribution of the Plasma Density in Planar Inductively Coupled Plasmas

Published

Author(s)

A Schwabedissen, Eric C. Benck, J R. Roberts
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
56

Citation

Schwabedissen, A. , Benck, E. and Roberts, J. (1997), The Influence of Different Coil Geometries on the Spatial Distribution of the Plasma Density in Planar Inductively Coupled Plasmas, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics) (Accessed February 21, 2024)
Created January 1, 1997, Updated February 17, 2017