Schwabedissen, A.
, Benck, E.
and Roberts, J.
(1997),
The Influence of Different Coil Geometries on the Spatial Distribution of the Plasma Density in Planar Inductively Coupled Plasmas, Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
(Accessed May 3, 2024)
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The Influence of Different Coil Geometries on the Spatial Distribution of the Plasma Density in Planar Inductively Coupled Plasmas
Published
Author(s)
, ,
Citation
Physical Review E (Statistical, Nonlinear, and Soft Matter Physics)
Volume
56
Pub Type
Journals
Citation
Created January 1, 1997, Updated February 17, 2017