Improving the Sensitivity of Electron Beam Microanalytical Techniques by Enhanced X-Ray Spectrometry: X-Ray Microcalorimetry, Silicon Drift Detector Energy Dispersive X-ray Spectrometry, and Polycapillary X-ray Optics

Published

December 25, 2003

Author(s)

Dale E. Newbury

Abstract

The microcalorimeter energy dispersive x-ray spectrometer, the silicon drift detector (SDD), and polycapillary x-ray optics are recent developments that have significantly advanced analytical x-ray spectrometry for electron beam instruments. The microcalorimeter EDS is capable of high resolution operation (approximately 5 eV wide peaks) over a wide range of photon energies (250 eV 10 keV). The microcalorimeter EDS can be successfully applied to peak interference problems that are not accessible with the conventional semiconductor EDS such as TiN and BaTiO3. Polycapillary x-ray optics can augment the collection angle of the microcalorimeter EDS to increase its sensitivity. The SDD is capable of extremely high count rates, up to 1 MHz, and is especially useful for high speed x-ray mapping.

Citation

e-Journal of Surface Science and Nanotechnology

Volume

1

Pub Type

Journals

Keywords

energy dispersive x-ray spectrometry, microanalysis, microcalorimeter, polycapillary x-ray optics, silicon drift detector, wavelength dispersive x-ray spectrometry, x-ray spectrometry

Citation

Newbury, D. (2003), Improving the Sensitivity of Electron Beam Microanalytical Techniques by Enhanced X-Ray Spectrometry: X-Ray Microcalorimetry, Silicon Drift Detector Energy Dispersive X-ray Spectrometry, and Polycapillary X-ray Optics, e-Journal of Surface Science and Nanotechnology (Accessed April 22, 2024)