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Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope

Published

Author(s)

R Koning, Ronald G. Dixson, Joseph Fu, V W. Tsai

Abstract

No abstract.
Proceedings Title
Quantitative Microscopy, Seminar | 3rd |
Volume
No. 34
Conference Dates
November 1, 1998
Conference Location
Lyngby, 1, DE
Conference Title
Physikalisch Technische Bundesanstalt

Keywords

atomic force microscopy, metrology, pitch, step height

Citation

Koning, R. , Dixson, R. , Fu, J. and Tsai, V. (1998), Improving Pitch and Step Height Measurements Using the Calibrated Atomic Force Microscope, Quantitative Microscopy, Seminar | 3rd |, Lyngby, 1, DE (Accessed May 19, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created October 31, 1998, Updated October 12, 2021