Improved Radiometry For Extreme-Ultraviolet Lithography

Published

November 1, 2004

Author(s)

Charles S. Tarrio, Robert E. Vest, Steven E. Grantham, K Liu, Thomas B. Lucatorto, Ping-Shine Shaw

Abstract

The absolute cryogenic radiometer (ACR), an electrical-substitution-based detector, is the most accurate method for measurement of radiant power in the extreme ultraviolet. At the National Institute of Standards and Technology, ACR-based measurements are currently used as standards from the infrared and into the vacuum ultraviolet, however, no radiometric facilities are currently in operation with enough incident power to use an ACR in the extreme-ultraviolet region. Therefore, we have installed transfer optics on an existing beamline to allow the installation of the ACR as an additional endstation. We will describe the current radiometric beamline, the ACR, and the high-throughput beamline, and the transfer-optical system. Finally, we will present the performance of the transfer optics and measurements of the beam profile and incident power of the new endstation.

Proceedings Title

International Conference on Synchrotron Radiation Instrumentation

Volume

708

Conference Dates

August 25-29, 2003

Conference Title

AIP Conference Proceedings

Pub Type

Conferences

Keywords

dosimetry, extreme ultraviolet, lithography, photodiodes, radiometry

Citation

Tarrio, C. , Vest, R. , Grantham, S. , Liu, K. , Lucatorto, T. and Shaw, P. (2004), Improved Radiometry For Extreme-Ultraviolet Lithography, International Conference on Synchrotron Radiation Instrumentation (Accessed April 16, 2024)