@conference{171586,
  author = {Charles Tarrio and Robert Vest and Steven Grantham and K Liu and Thomas Lucatorto and Ping-Shine Shaw},
  title = {Improved Radiometry For Extreme-Ultraviolet Lithography},
  year = {2004},
  number = {708},
  month = {2004-11-01},
  publisher = {International Conference on Synchrotron Radiation Instrumentation},
  language = {en},
}