An Improved Digital Image Correlation Method Applied to Scanning Probe Microscope Images

Published

October 1, 2009

Author(s)

Wei Chu, Joseph Fu, Theodore V. Vorburger

Abstract

Digital image correlation (DIC) is a method for measuring the surface displacements and displacement gradients in materials under deformation. During the calculation, the traditional DIC method directly uses the intensity values of compared images and does not take out-of-plane error into account. However, in scanning probe microscopy measurements, the recorded z-direction intensity value is a sum of the real topography surface of the sample and any longitudinal nonlinear deformation of the piezoelectric tube. In order to improve the calculation accuracy of the displacement fields, an improved DIC method is performed by which the real topography is separated from the z-direction drift error. Two unknown parameters related to out-of-plane drift error are introduced in the correlation coefficient. The in-plane displacements between two compared images are then calculated pixel by pixel using the real topography data extracted from the raw data, with the drift error removed. This method is tested by applying it to two pairs of atomic force microscopy images along the fast and slow scan directions.

Proceedings Title

2009 Proceedings of the ASME International Manufacturing Science and Engineering Conference

Conference Dates

October 4-7, 2009

Conference Location

West Lafayette, IN

Conference Title

2009 ASME International Manufacturing Science and Engineering Conference

Pub Type

Conferences

Keywords

digital image correlation, Newton-Raphson iteration, scanning probe microscopy, piezoelectricity tube, hysteresis

Citation

Chu, W. , Fu, J. and Vorburger, T. (2009), An Improved Digital Image Correlation Method Applied to Scanning Probe Microscope Images, 2009 Proceedings of the ASME International Manufacturing Science and Engineering Conference, West Lafayette, IN (Accessed September 19, 2024)