Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Impact of the precursor gas ratio on dispersion engineering of broadband silicon nitride microresonator frequency combs

Published

Author(s)

Gregory Moille, Daron Westly, Gregory Simelgor, Kartik Srinivasan

Abstract

Microresonator frequency combs, or microcombs, have gained wide appeal for their rich nonlinear physics and wide range of applications. Stoichiometric silicon nitride films grown via low-pressure chemical vapor deposition (LPCVD), in particular, are widely used in chip-integrated Kerr microcrocombs. Critical to such devices is the ability to control the microresonator dispersion, which has contributions from both material refractive index dispersion and geometric confinement. Here, we show that modifications to the LPCVD growth conditions, specifically the ratio of the gaseous precursors, has a significant impact on material dispersion and hence the overall microresonator dispersion. In contrast to the many efforts focused on comparison between Si-rich films and stoichiometric (Si$_3$N$_4$) films, here we entirely focus on films that are within the nominally stoichiometric growth regime. We further show that microresonator geometric dispersion can be tuned to compensate for changes in the material dispersion.
Citation
Optics Letters
Volume
46
Issue
23

Keywords

microcomb, nano fabrication, silicon nitride

Citation

Moille, G. , Westly, D. , Simelgor, G. and Srinivasan, K. (2021), Impact of the precursor gas ratio on dispersion engineering of broadband silicon nitride microresonator frequency combs, Optics Letters, [online], https://doi.org/10.1364/OL.440907, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=933032 (Accessed April 19, 2024)
Created November 29, 2021, Updated November 29, 2022