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Imaging Defects in Strained Silicon Thin Films by X-ray Topography

Published

Author(s)

David R. Black, Joseph C. Woicik, M Erdtmann, M T. Currie
Citation
Applied Physics Letters
Volume
88
Issue
22

Citation

Black, D. , Woicik, J. , Erdtmann, M. and Currie, M. (2006), Imaging Defects in Strained Silicon Thin Films by X-ray Topography, Applied Physics Letters, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854299 (Accessed April 23, 2024)
Created May 29, 2006, Updated February 19, 2017