Hyperthermal (1-10 eV) cobalt deposition on Si(100)
M P. Knowles, S R. Leone
Cobalt atoms with enhanced kinetic energy (0-10 eV) are deposited on room temperature Si(100) and compared to thermal cobalt deposition. Growth is monitored with Auger electron spectroscopy (AES) and low energy electron diffraction (LEED). At low coverages, δ,2ML, thermal deposition measurements agree with previous work where uptake at surface sites occurs up to approximately equal to} 0.5 ML, followed by filling subsurface sites. Auger data suggests that hyperthermal deposition occurs by direct subsurface adsorption.
Chemical Physics Letters
auger, cobalt, deposition, hyperthermal, silicon
and Leone, S.
Hyperthermal (1-10 eV) cobalt deposition on Si(100), Chemical Physics Letters
(Accessed June 4, 2023)