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Hybrid Postprocessing Etching for CMOS-Compatible MEMS

Published

Author(s)

N. H. Tea, V. Milanovic, C. A. Zincke, John S. Suehle, Michael Gaitan, Mona E. Zaghloul
Citation
Journal of Microelectromechanical Systems
Volume
6
Issue
4

Citation

Tea, N. , Milanovic, V. , Zincke, C. , Suehle, J. , Gaitan, M. and Zaghloul, M. (1997), Hybrid Postprocessing Etching for CMOS-Compatible MEMS, Journal of Microelectromechanical Systems (Accessed April 18, 2024)
Created November 30, 1997, Updated October 12, 2021