Hybrid Postprocessing Etching for CMOS-Compatible MEMS

N. H. Tea; V. Milanovic; C. A. Zincke; John S. Suehle; Michael Gaitan; Mona E. Zaghloul

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PUBLICATIONS

Hybrid Postprocessing Etching for CMOS-Compatible MEMS

Published

December 1, 1997

Author(s)

N. H. Tea, V. Milanovic, C. A. Zincke, John S. Suehle, Michael Gaitan, Mona E. Zaghloul

Citation

Journal of Microelectromechanical Systems

Volume

Issue

Pub Type

Journals

Citation

Tea, N. , Milanovic, V. , Zincke, C. , Suehle, J. , Gaitan, M. and Zaghloul, M. (1997), Hybrid Postprocessing Etching for CMOS-Compatible MEMS, Journal of Microelectromechanical Systems (Accessed May 30, 2026)

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Created November 30, 1997, Updated October 12, 2021

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